The Reference


High-end measuring machine for maximum precision

ZEISS XENOS is at home wherever maximum precision is demanded – in the measuring labs of research institutes, the aerospace industry and the optical industry. The high-end machine combines precision at the limits of what is technically feasible with a measuring range of nearly one cubic meter.



Virtual central drive

XENOS from ZEISS features two linear drives in the Y direction, which are synchronized via a new technology developed by ZEISS: the central drive. It ensures optimal force distribution of the drives depending on the position of the X axis.

This is enabled by the latest generation of controller and algorithm. It is a key element of maximum accuracy and the best possible path adherence throughout the measuring range.

Linear drives in all axes

ZEISS XENOS uses linear drives on all axes. The benefits: high speeds, very fast acceleration, high positioning accuracy and shear force-free drives. In conjunction with the high resolution scales, the use of linear drives on ZEISS XENOS provide very high path adherence and extremely high positioning accuracy below 100 nanometers.

For example, the stylus deflection remains more constant, which results in higher accuracy. Another benefit is evident when measuring curved surfaces: the more reliably and accurately a stylus follows the specified path, the more precisely errors can be determined.

Silicon-carbide ceramic

ZEISS XENOS uses an innovative silicon-carbide ceramic for the parts of the machine structure relevant to accuracy. Until now, this material has rarely been used for a comparable part size or accuracy.

Compared to the standard aluminum-oxide ceramic, silicon-carbide ceramic exhibits around 50 percent lower thermal expansion, up to 30 percent higher rigidity and 20 percent less weight. Compared to steel, it delivers twice the rigidity at half the weight.

Innovative mechanical design

ZEISS XENOS impresses with its new mechanical design based on the proven ZEISS CenterMax. Unlike the standard bridge-type design, the Y guideways are on top of the side walls which separate all moving axes from the clamping area. Because only the cross beam moves in the Y direction, there are lower moving masses.This remains constant at all times – a real benefit compared to a moving table. Together, the weight reduction and constantly moving masses enable optimal coordination of the drives regarding acceleration and maximum speed.

In addition, new air bearings with an even more rigid connection enhance stability and therefore enable better accuracy.

ZEISS XENOS impresses with its new mechanical design
New Computer-Aided Accuracy (CAA) acceptance methods and additional CAA corrections of ZEISS XENOS help to achieve maximum accuracy.

Improved electronics design

The influence on precision of moving cables on all coordinate measuring machines has been clearly reduced through the improved decoupling and a new electronics concept featuring decentralized modules. 

New Computer-Aided Accuracy (CAA) acceptance methods and additional CAA corrections are playing an increasingly vital role in achieving maximum accuracy.

Enhanced ZEISS VAST gold

ZEISS XENOS comes standard with the VAST gold reference probe from ZEISS. During development of ZEISS XENOS, this powerful sensor from ZEISS was further optimized for better accuracy and repeatability.

The more rigid connection to the ram on ZEISS XENOS is also new. ZEISS VAST gold sensor is designed for styli up to 800 millimeters long and stylus weights up to 500 grams, including asymmetrical stylus configurations.

With ZEISS XENOS and the enhanced ZEISS VAST gold you can measure very precisely.

Technical Data for ZEISS XENOS



Measuring range X/Y/Z

length measurement error E0 in μm


0.3 + L/1,000

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ZEISS Adapter Plates, EN

ZEISS Adapter Plates, EN
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